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Publications by Alain C. Diebold
Role of Ge and Si Substrates in Higher-K Tetragonal Phase Formation and Interfacial Properties in Cyclical Atomic Layer Deposition-Anneal Hf1−xZrxO2/Al2O3 Thin Film Stacks
Journal of Applied Physics
Astronomy
Physics
Scanning He+ Ion Beam Microscopy and Metrology
TSOM Method for Nanoelectronics Dimensional Metrology
Analysis of the Noble Metals on Silicon Wafers by Chemical Collection and ICPMS
Current Voltage Characteristics Through Grains and Grain Boundaries of High-K Dielectric Thin Films Measured by Tunneling Atomic Force Microscopy
The Impact of Organic Contamination on the Oxide-Silicon Interface
Characterization of Nanodevices by STEM Tomography
Comparison of Submicron Particle Analysis by Auger Electron Spectroscopy, Time‐of‐flight Secondary Ion Mass Spectrometry, and Secondary Electron Microscopy With Energy Dispersive X‐ray Spectroscopy
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Surfaces
Films
Interfaces
Condensed Matter Physics
Coatings
Protocol Optimisation for Work-Function Measurements of Metal Gates Using Kelvin Force Microscopy
AIP Conference Proceedings
Astronomy
Physics
Development of a Focused-Beam Ellipsometer Based on a New Principle
AIP Conference Proceedings
Astronomy
Physics
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