Amanote Research
Register
Sign In
Discover open access scientific publications
Search, annotate, share and cite publications
Publications by Michaela Vockenhuber
Progress Overview of EUV Resists Status Towards High-Na EUV Lithography
Progress in EUV Resists Towards High-Na EUV Lithography
Low-Ler Tin Carboxylate Photoresists Using EUV
High-Sensitivity Molecular Organometallic Resist for EUV (MORE)
