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Publications by Toshihiro Itani

Advancements in EUV Resist Materials and Processing

Journal of Photopolymer Science and Technology

Organic Chemistry

Materials Chemistry

English

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Evaluation of Resist Capability for EUV Lithography

Journal of Photopolymer Science and Technology

Organic Chemistry

Materials Chemistry

English

In Situ Analysis of the EUV Resist Pattern Formation During the Resist Dissolution Process

Journal of Photopolymer Science and Technology

Organic Chemistry

Materials Chemistry

English

Recent Progress in EUV Resist Outgas Research at EIDEC

Journal of Photopolymer Science and Technology

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Comparison of Resist Family Outgassing Characterization Between EUV and EB

Journal of Photopolymer Science and Technology

Organic Chemistry

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Metal Containing Resist Readiness for HVM EUV Lithography

Journal of Photopolymer Science and Technology

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High-Sensitivity Molecular Organometallic Resist for EUV (MORE)

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Evaluation of EUV Resist Performance Using Interference Lithography

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Recent Advancements in Signal Processing and Machine Learning

Mathematical Problems in Engineering

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EUV Microscopy: A Unique Approach for Materials Characterization

English