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Publications by Soichi Inoue
Comparison of Resist Family Outgassing Characterization Between EUV and EB
Journal of Photopolymer Science and Technology
Organic Chemistry
Polymers
Materials Chemistry
Plastics
Recent Progress in EUV Resist Outgas Research at EIDEC
Journal of Photopolymer Science and Technology
Organic Chemistry
Polymers
Materials Chemistry
Plastics
Related publications
Comparison of EB Exposure Characteristics Between HSQ and Calix Arene of High Resolution Negative Resist
Journal of Photopolymer Science and Technology
Organic Chemistry
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The Performances and Challenges of Today’s EB Lithography and EB-resist Materials
Journal of Photopolymer Science and Technology
Organic Chemistry
Polymers
Materials Chemistry
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Advancements in EUV Resist Materials and Processing
Journal of Photopolymer Science and Technology
Organic Chemistry
Polymers
Materials Chemistry
Plastics
Evaluation of Resist Capability for EUV Lithography
Journal of Photopolymer Science and Technology
Organic Chemistry
Polymers
Materials Chemistry
Plastics
Evaluation of EUV Resist Performance Using Interference Lithography
Metal Containing Resist Readiness for HVM EUV Lithography
Journal of Photopolymer Science and Technology
Organic Chemistry
Polymers
Materials Chemistry
Plastics
High-Sensitivity Molecular Organometallic Resist for EUV (MORE)
In Situ Analysis of the EUV Resist Pattern Formation During the Resist Dissolution Process
Journal of Photopolymer Science and Technology
Organic Chemistry
Polymers
Materials Chemistry
Plastics
