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Publications by Yasin Ekinci
Quantitative Characterization of Absorber and Phase Defects on EUV Reticles Using Coherent Diffraction Imaging
Journal of Micro/ Nanolithography, MEMS, and MOEMS
Electronic Engineering
Condensed Matter Physics
Mechanical Engineering
Electronic
Molecular Physics,
Nanoscience
Optical
Electrical
Atomic
Magnetic Materials
Nanotechnology
Optics
Platinum and Palladium Oxalates: Positive-Tone Extreme Ultraviolet Resists
Journal of Micro/ Nanolithography, MEMS, and MOEMS
Electronic Engineering
Condensed Matter Physics
Mechanical Engineering
Electronic
Molecular Physics,
Nanoscience
Optical
Electrical
Atomic
Magnetic Materials
Nanotechnology
Optics
An Unusual Foreign Body Aspiration Case: Fresh Chickpeas Membrane
Pamukkale Medical Journal
Progress Overview of EUV Resists Status Towards High-Na EUV Lithography
Amplitude and Phase Defect Inspection on EUV Reticles Using RESCAN
Progress in EUV Resists Towards High-Na EUV Lithography
Low-Ler Tin Carboxylate Photoresists Using EUV
Towards 11nm Half-Pitch Resolution for a Negative-Tone Chemically Amplified Molecular Resist Platform for Extreme-Ultraviolet Lithography
High-Sensitivity Molecular Organometallic Resist for EUV (MORE)
